Fabrication technology for development of micro and nanosensors, actuators, and modules (e.g., microelectromechanical systems, nanoelectromechanical systems, micro or nanofluidics channels). Integration using examples drawn from chemical analysis micro and nanoinstruments. An overview of current micro and nanoinstruments. [Offered: F] Prereq: NE 242, 335, 343, 344, 352, 353; 4A Nanotechnology Engineering students only
