Theory and application of nanoprobing based on scanning probe microscopy (scanning tunneling microscopy, atomic force microscopy, scanning near-field optical microscopy). Nanolithographic techniques (extreme-UV lithography, X-ray lithography, e-beam lithography, focused ion beam lithography, nano-imprint lithography and soft lithography). [Offered: F] Prereq: NE 224, 343; 3B Nanotechnology Engineering students only. Coreq: NE 335
