Surfaces and interfaces in microelectronics and nanofabrication. Physicochemistry of interfaces. Capillary phenomena and molecular self-assembly. Structure and properties of clean and adsorbate covered surfaces (metals, semiconductors, oxides). Reactions at surfaces and catalysis. Surface electrochemistry, growth and diffusion, nanoscale structure formation/surface patterning, biological interfaces. [Offered: F] Prereq: NE 225, 226, 232, 334; 3B Nanotechnology Engineering students only. Antireq: CHEM 450 (topic: Surface Science and Nanotechnology)