Introduction to MEMS. Fabrication processes for MEMS devices. Basic MEMS governing equations in different energy domains (Mechanical, electrical and thermal). Methods for layout, design and modeling of MEMS devices. Simulation techniques. Techniques for testing and characterization of MEMS devices. [Offered: F ] Prereq: Level at least 3B Computer, Electrical, Mechanical, Mechatronics, or Systems Design Engineering
